JPH0538922Y2 - - Google Patents

Info

Publication number
JPH0538922Y2
JPH0538922Y2 JP18016387U JP18016387U JPH0538922Y2 JP H0538922 Y2 JPH0538922 Y2 JP H0538922Y2 JP 18016387 U JP18016387 U JP 18016387U JP 18016387 U JP18016387 U JP 18016387U JP H0538922 Y2 JPH0538922 Y2 JP H0538922Y2
Authority
JP
Japan
Prior art keywords
door
small chamber
chamber
low
robot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP18016387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0185018U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18016387U priority Critical patent/JPH0538922Y2/ja
Publication of JPH0185018U publication Critical patent/JPH0185018U/ja
Application granted granted Critical
Publication of JPH0538922Y2 publication Critical patent/JPH0538922Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Moulding By Coating Moulds (AREA)
JP18016387U 1987-11-26 1987-11-26 Expired - Lifetime JPH0538922Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18016387U JPH0538922Y2 (en]) 1987-11-26 1987-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18016387U JPH0538922Y2 (en]) 1987-11-26 1987-11-26

Publications (2)

Publication Number Publication Date
JPH0185018U JPH0185018U (en]) 1989-06-06
JPH0538922Y2 true JPH0538922Y2 (en]) 1993-10-01

Family

ID=31471688

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18016387U Expired - Lifetime JPH0538922Y2 (en]) 1987-11-26 1987-11-26

Country Status (1)

Country Link
JP (1) JPH0538922Y2 (en])

Also Published As

Publication number Publication date
JPH0185018U (en]) 1989-06-06

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